Mass Flow Controllers

Mass Flow Controllers – Overview

Mass flow controllers are used to control the flow of a gas according to a specific flow rate. MC-Series Mass Flow Controllers rapidly reach setpoints and maintain stable control of volumetric flow, mass flow, or pressure for 98+ gases across a very wide flow range. These products are highly customisable for easy integration.

Mass Flow Controllers – Features

Measure mass flow, volumetric flow, gas pressure, and gas temperature
Changeable units of measurement
Gas Select from 98+ preloaded NIST-traceable gas calibrations
Define 20 custom gas mixtures of up to 5 constituent gases
Monochrome backlit LCD with integrated touchpad
Configurable ramp rates and setpoint limits
Change reference conditions without need for recalibration
Valve close override and valve open override

Description

Mass Flow Controllers | MC series

Quick specs

Steady state control range:

0.01% – 100% of full scale

NIST-traceable calibration

Standard accuracy:

±0.6% of reading or ±0.1% of full scale, whichever is greater

High-accuracy

±0.5% of reading or ±0.1% of full scale, whichever is greater

Repeatability:

±(0.1% of reading + 0.02% of full scale)

Typical control response time:

as fast as 30 ms

Warm-up time:

<1 s

Operating conditions

Compatible gases:

98+ preloaded selectable gas calibrations and
20 custom gas mixes

Operating temperature:

-10°C to +60°C

Full scale operating pressure:

160 PSIA

Max differential pressure:

75 PSID

Proof pressure:

175 PSIA

User selectable reference conditions (defaults):

25°C & 1
ATM (STP) and 0°C & 1 ATM (NTP)

Alternative model options

MCQ-Series

High operating pressures (320 PSIA)

MCW-Series

Low pressure drops (0.07 PSID)

MCS-Series

Corrosive gases (128+ gases, including 32 corrosives)

Mass Flow Controllers | MC series

Mass Flow Controllers | MC series

Mass Flow Controllers | MC series